JPS6445173U - - Google Patents
Info
- Publication number
- JPS6445173U JPS6445173U JP13623987U JP13623987U JPS6445173U JP S6445173 U JPS6445173 U JP S6445173U JP 13623987 U JP13623987 U JP 13623987U JP 13623987 U JP13623987 U JP 13623987U JP S6445173 U JPS6445173 U JP S6445173U
- Authority
- JP
- Japan
- Prior art keywords
- melt
- filled
- semiconductor wafer
- carbon
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000155 melt Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623987U JPS6445173U (no) | 1987-09-08 | 1987-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623987U JPS6445173U (no) | 1987-09-08 | 1987-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445173U true JPS6445173U (no) | 1989-03-17 |
Family
ID=31396560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13623987U Pending JPS6445173U (no) | 1987-09-08 | 1987-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445173U (no) |
-
1987
- 1987-09-08 JP JP13623987U patent/JPS6445173U/ja active Pending