JPS6445173U - - Google Patents
Info
- Publication number
- JPS6445173U JPS6445173U JP13623987U JP13623987U JPS6445173U JP S6445173 U JPS6445173 U JP S6445173U JP 13623987 U JP13623987 U JP 13623987U JP 13623987 U JP13623987 U JP 13623987U JP S6445173 U JPS6445173 U JP S6445173U
- Authority
- JP
- Japan
- Prior art keywords
- melt
- filled
- semiconductor wafer
- carbon
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000155 melt Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図はこの考案の液相成長用カーボンボート
におけるメルトボツクの斜視図、第２図ａは同上
実施例におけるカーボン製のキヤツプの平面図、
第２図ｂは第２図ａの右側面図、第２図ｃは同上
キヤツプの正面図、第３図は同上メルトボツクス
の透視図、第４図は従来の液相成長用スライドボ
ートの断面図である。
２１……メルトボツクス、２２〜２４……穴、
２５……キヤツプ、２６……球面、２７……融液
。
FIG. 1 is a perspective view of a melt pot in a carbon boat for liquid phase growth of this invention, and FIG. 2a is a plan view of a carbon cap in the same embodiment.
Figure 2b is a right side view of Figure 2a, Figure 2c is a front view of the same cap, Figure 3 is a perspective view of the meltbox, and Figure 4 is a cross section of a conventional slide boat for liquid phase growth. It is a diagram. 21...melt box, 22-24...hole,
25... Cap, 26... Spherical surface, 27... Melt.
Claims (1)
半導体ウエハに半導体結晶成長のための融液を充
填する穴を有するメルトボツクスと、 (b) 上記穴に上記融液を充填したのちにこの融
液の上にのせ融液と接する面を球面状に形成され
たカーボン製のキヤツプと、 よりなる液相成長用カーボンボート。[Claims for Utility Model Registration] (a) A melt box having a hole on a slider on which a semiconductor wafer is placed, through which the semiconductor wafer is filled with a melt for semiconductor crystal growth; A carbon boat for liquid phase growth consisting of a carbon cap that is filled with a liquid and then placed on top of the melt, with the surface in contact with the melt formed into a spherical shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623987U JPS6445173U (en) | 1987-09-08 | 1987-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623987U JPS6445173U (en) | 1987-09-08 | 1987-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445173U true JPS6445173U (en) | 1989-03-17 |
Family
ID=31396560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13623987U Pending JPS6445173U (en) | 1987-09-08 | 1987-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445173U (en) |
-
1987
- 1987-09-08 JP JP13623987U patent/JPS6445173U/ja active Pending