JPS6445159U - - Google Patents
Info
- Publication number
- JPS6445159U JPS6445159U JP13850187U JP13850187U JPS6445159U JP S6445159 U JPS6445159 U JP S6445159U JP 13850187 U JP13850187 U JP 13850187U JP 13850187 U JP13850187 U JP 13850187U JP S6445159 U JPS6445159 U JP S6445159U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- rings
- vacuum
- exhaust pipe
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13850187U JPS6445159U (fi) | 1987-09-09 | 1987-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13850187U JPS6445159U (fi) | 1987-09-09 | 1987-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445159U true JPS6445159U (fi) | 1989-03-17 |
Family
ID=31400895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13850187U Pending JPS6445159U (fi) | 1987-09-09 | 1987-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445159U (fi) |
-
1987
- 1987-09-09 JP JP13850187U patent/JPS6445159U/ja active Pending