JPS6445153U - - Google Patents

Info

Publication number
JPS6445153U
JPS6445153U JP13798287U JP13798287U JPS6445153U JP S6445153 U JPS6445153 U JP S6445153U JP 13798287 U JP13798287 U JP 13798287U JP 13798287 U JP13798287 U JP 13798287U JP S6445153 U JPS6445153 U JP S6445153U
Authority
JP
Japan
Prior art keywords
inert gas
chamber
heat exchanger
gas flow
conduit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13798287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0437881Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13798287U priority Critical patent/JPH0437881Y2/ja
Publication of JPS6445153U publication Critical patent/JPS6445153U/ja
Application granted granted Critical
Publication of JPH0437881Y2 publication Critical patent/JPH0437881Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
JP13798287U 1987-09-09 1987-09-09 Expired JPH0437881Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13798287U JPH0437881Y2 (cg-RX-API-DMAC10.html) 1987-09-09 1987-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13798287U JPH0437881Y2 (cg-RX-API-DMAC10.html) 1987-09-09 1987-09-09

Publications (2)

Publication Number Publication Date
JPS6445153U true JPS6445153U (cg-RX-API-DMAC10.html) 1989-03-17
JPH0437881Y2 JPH0437881Y2 (cg-RX-API-DMAC10.html) 1992-09-04

Family

ID=31399904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13798287U Expired JPH0437881Y2 (cg-RX-API-DMAC10.html) 1987-09-09 1987-09-09

Country Status (1)

Country Link
JP (1) JPH0437881Y2 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPH0437881Y2 (cg-RX-API-DMAC10.html) 1992-09-04

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