JPS6445121A - Mark position detector - Google Patents

Mark position detector

Info

Publication number
JPS6445121A
JPS6445121A JP62202688A JP20268887A JPS6445121A JP S6445121 A JPS6445121 A JP S6445121A JP 62202688 A JP62202688 A JP 62202688A JP 20268887 A JP20268887 A JP 20268887A JP S6445121 A JPS6445121 A JP S6445121A
Authority
JP
Japan
Prior art keywords
mark
value
impulse
circuit
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62202688A
Other languages
Japanese (ja)
Other versions
JPH0682607B2 (en
Inventor
Nobuo Iida
Teruaki Okino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62202688A priority Critical patent/JPH0682607B2/en
Publication of JPS6445121A publication Critical patent/JPS6445121A/en
Publication of JPH0682607B2 publication Critical patent/JPH0682607B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE:To make it possible to detect a mark position regardless of noises, by performing impulse-response operation of the difference signal or the added signal of two signals from a mark without a differential circuit, and obtaining the position of the mark and the width of the mark based on the peak value. CONSTITUTION:An impulse-response operating circuit 11 receives the difference signal from an operating circuit 4 and performs impulse response operation. A maximum-value/minimum-value detecting circuit 12 receives the output of the impulse-response operating circuit 11 and detects the maximum value and the minimum value. In place of a differential circuit, the impulse-response operation is performed, and the central position of a mark and the peak of the signal are emphasized based on the detected signal. Therefore, the position of the mark and the width of the mark can be obtained based on the output of the maximum-value/minimum-value detecting circuit 12. Thus the mark position can be detected regardless of noises.
JP62202688A 1987-08-13 1987-08-13 Mark position detector Expired - Fee Related JPH0682607B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62202688A JPH0682607B2 (en) 1987-08-13 1987-08-13 Mark position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62202688A JPH0682607B2 (en) 1987-08-13 1987-08-13 Mark position detector

Publications (2)

Publication Number Publication Date
JPS6445121A true JPS6445121A (en) 1989-02-17
JPH0682607B2 JPH0682607B2 (en) 1994-10-19

Family

ID=16461507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62202688A Expired - Fee Related JPH0682607B2 (en) 1987-08-13 1987-08-13 Mark position detector

Country Status (1)

Country Link
JP (1) JPH0682607B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013046018A (en) * 2011-08-26 2013-03-04 Dainippon Kaken:Kk Positioning method of substrate
KR101371178B1 (en) * 2012-03-27 2014-03-07 원광대학교산학협력단 Apparatus and method for detecting position

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013046018A (en) * 2011-08-26 2013-03-04 Dainippon Kaken:Kk Positioning method of substrate
KR101371178B1 (en) * 2012-03-27 2014-03-07 원광대학교산학협력단 Apparatus and method for detecting position

Also Published As

Publication number Publication date
JPH0682607B2 (en) 1994-10-19

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees