JPS6444882A - Method for measuring ion beam - Google Patents
Method for measuring ion beamInfo
- Publication number
- JPS6444882A JPS6444882A JP62202359A JP20235987A JPS6444882A JP S6444882 A JPS6444882 A JP S6444882A JP 62202359 A JP62202359 A JP 62202359A JP 20235987 A JP20235987 A JP 20235987A JP S6444882 A JPS6444882 A JP S6444882A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- measured
- measuring
- scattering
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement Of Radiation (AREA)
Abstract
PURPOSE:To measure ion beam in a non-contact manner within a short time, by irradiating the ion beam, which irradiates an object to be irradiated, with laser beam variable in a wavelength to generate resonance scattering and performing the measuring operation of the spectral line of the scattering beam at plural measuring points in the ion beam. CONSTITUTION:The irradiation position of laser beam to an ion and/or the measuring position of scattering beam 20 by a spectroscope 26 are appropriately moved by a scanner 12 and/or 24. Then, the spatial density distribution of ion beam is measured through the spectrum intensity ratio between a plurality of measuring points 16. At the same time, the energy dispersion of the ion beam 4 at every measuring point 16 is measured. These measured data are processed if necessary by the data processing system 28 connected to the spectroscope 26. By this method, the energy dispersion and spatial density distribution of the ion beam actually used in the irradiation of an object 6 to be irradiated can be measured on the spot within a short time in a non-contact manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62202359A JPS6444882A (en) | 1987-08-12 | 1987-08-12 | Method for measuring ion beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62202359A JPS6444882A (en) | 1987-08-12 | 1987-08-12 | Method for measuring ion beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444882A true JPS6444882A (en) | 1989-02-17 |
Family
ID=16456202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62202359A Pending JPS6444882A (en) | 1987-08-12 | 1987-08-12 | Method for measuring ion beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444882A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100987583B1 (en) * | 2008-10-27 | 2010-10-12 | 포항공과대학교 산학협력단 | Apparatus and method for monitoring beam position by using electro-optic effect |
| JP2018180179A (en) * | 2017-04-10 | 2018-11-15 | 浜松ホトニクス株式会社 | Quantum simulator and method for quantum simulation |
| CN111796319A (en) * | 2020-07-14 | 2020-10-20 | 中国科学院近代物理研究所 | Broadband imaginary part beam coupling impedance measurement system and method |
-
1987
- 1987-08-12 JP JP62202359A patent/JPS6444882A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100987583B1 (en) * | 2008-10-27 | 2010-10-12 | 포항공과대학교 산학협력단 | Apparatus and method for monitoring beam position by using electro-optic effect |
| JP2018180179A (en) * | 2017-04-10 | 2018-11-15 | 浜松ホトニクス株式会社 | Quantum simulator and method for quantum simulation |
| US11567450B2 (en) | 2017-04-10 | 2023-01-31 | Hamamatsu Photonics K.K. | Quantum simulator and quantum simulation method |
| CN111796319A (en) * | 2020-07-14 | 2020-10-20 | 中国科学院近代物理研究所 | Broadband imaginary part beam coupling impedance measurement system and method |
| CN111796319B (en) * | 2020-07-14 | 2022-05-31 | 中国科学院近代物理研究所 | Broadband imaginary part beam coupling impedance measurement system and method |
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