JPS6444631U - - Google Patents

Info

Publication number
JPS6444631U
JPS6444631U JP13799487U JP13799487U JPS6444631U JP S6444631 U JPS6444631 U JP S6444631U JP 13799487 U JP13799487 U JP 13799487U JP 13799487 U JP13799487 U JP 13799487U JP S6444631 U JPS6444631 U JP S6444631U
Authority
JP
Japan
Prior art keywords
reaction
gas
pressure sensor
reaction chamber
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13799487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13799487U priority Critical patent/JPS6444631U/ja
Publication of JPS6444631U publication Critical patent/JPS6444631U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13799487U 1987-09-09 1987-09-09 Pending JPS6444631U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13799487U JPS6444631U (US07655688-20100202-C00086.png) 1987-09-09 1987-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13799487U JPS6444631U (US07655688-20100202-C00086.png) 1987-09-09 1987-09-09

Publications (1)

Publication Number Publication Date
JPS6444631U true JPS6444631U (US07655688-20100202-C00086.png) 1989-03-16

Family

ID=31399927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13799487U Pending JPS6444631U (US07655688-20100202-C00086.png) 1987-09-09 1987-09-09

Country Status (1)

Country Link
JP (1) JPS6444631U (US07655688-20100202-C00086.png)

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