JPS6442404U - - Google Patents

Info

Publication number
JPS6442404U
JPS6442404U JP13703387U JP13703387U JPS6442404U JP S6442404 U JPS6442404 U JP S6442404U JP 13703387 U JP13703387 U JP 13703387U JP 13703387 U JP13703387 U JP 13703387U JP S6442404 U JPS6442404 U JP S6442404U
Authority
JP
Japan
Prior art keywords
tilted
respect
rotation axis
chip
surface inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13703387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH053923Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13703387U priority Critical patent/JPH053923Y2/ja
Publication of JPS6442404U publication Critical patent/JPS6442404U/ja
Application granted granted Critical
Publication of JPH053923Y2 publication Critical patent/JPH053923Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP13703387U 1987-09-08 1987-09-08 Expired - Lifetime JPH053923Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13703387U JPH053923Y2 (cs) 1987-09-08 1987-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13703387U JPH053923Y2 (cs) 1987-09-08 1987-09-08

Publications (2)

Publication Number Publication Date
JPS6442404U true JPS6442404U (cs) 1989-03-14
JPH053923Y2 JPH053923Y2 (cs) 1993-01-29

Family

ID=31398096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13703387U Expired - Lifetime JPH053923Y2 (cs) 1987-09-08 1987-09-08

Country Status (1)

Country Link
JP (1) JPH053923Y2 (cs)

Also Published As

Publication number Publication date
JPH053923Y2 (cs) 1993-01-29

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