JPS6442389A - Pulling device for silicon single crystal - Google Patents

Pulling device for silicon single crystal

Info

Publication number
JPS6442389A
JPS6442389A JP19710587A JP19710587A JPS6442389A JP S6442389 A JPS6442389 A JP S6442389A JP 19710587 A JP19710587 A JP 19710587A JP 19710587 A JP19710587 A JP 19710587A JP S6442389 A JPS6442389 A JP S6442389A
Authority
JP
Japan
Prior art keywords
heater
axis
magnet coil
force
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19710587A
Other languages
Japanese (ja)
Inventor
Osamu Suzuki
Masato Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP19710587A priority Critical patent/JPS6442389A/en
Publication of JPS6442389A publication Critical patent/JPS6442389A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To prevent generation of crack in a terminal of a heater, and to prevent deterioration of life of the heater by providing electrodes to both ends of diameters of the heater in stalled orthogonally to an axis of a magnet coil, and arranging two slits provided to the heater on the axis of the magnet coil. CONSTITUTION:Electrodes 9, 9 are installed to both ends of diameters of a heater 6 crossing orthogonally to an axis 11, 11 of a magnet coil interposing clamps 7, 7 and two 6a, 6b of slits provided to a heater 6 are arranged so as to be positioned on the axis of the magnet coil 11, 11. By this constitution, a force for turning the heater in clockwise direction is equalized to a force for turning the same in counterclockwise direction. Therefore, it is not more necessary to fix the heater with a great force, and deterioration of life of the heater due to generation of cracks in the terminals of the heater is prevented.
JP19710587A 1987-08-06 1987-08-06 Pulling device for silicon single crystal Pending JPS6442389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19710587A JPS6442389A (en) 1987-08-06 1987-08-06 Pulling device for silicon single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19710587A JPS6442389A (en) 1987-08-06 1987-08-06 Pulling device for silicon single crystal

Publications (1)

Publication Number Publication Date
JPS6442389A true JPS6442389A (en) 1989-02-14

Family

ID=16368812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19710587A Pending JPS6442389A (en) 1987-08-06 1987-08-06 Pulling device for silicon single crystal

Country Status (1)

Country Link
JP (1) JPS6442389A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0781874A3 (en) * 1995-12-28 1998-03-04 Shin-Etsu Handotai Company Limited Apparatus for producing silicon single crystal

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0781874A3 (en) * 1995-12-28 1998-03-04 Shin-Etsu Handotai Company Limited Apparatus for producing silicon single crystal

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