JPS6442389A - Pulling device for silicon single crystal - Google Patents
Pulling device for silicon single crystalInfo
- Publication number
- JPS6442389A JPS6442389A JP19710587A JP19710587A JPS6442389A JP S6442389 A JPS6442389 A JP S6442389A JP 19710587 A JP19710587 A JP 19710587A JP 19710587 A JP19710587 A JP 19710587A JP S6442389 A JPS6442389 A JP S6442389A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- axis
- magnet coil
- force
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To prevent generation of crack in a terminal of a heater, and to prevent deterioration of life of the heater by providing electrodes to both ends of diameters of the heater in stalled orthogonally to an axis of a magnet coil, and arranging two slits provided to the heater on the axis of the magnet coil. CONSTITUTION:Electrodes 9, 9 are installed to both ends of diameters of a heater 6 crossing orthogonally to an axis 11, 11 of a magnet coil interposing clamps 7, 7 and two 6a, 6b of slits provided to a heater 6 are arranged so as to be positioned on the axis of the magnet coil 11, 11. By this constitution, a force for turning the heater in clockwise direction is equalized to a force for turning the same in counterclockwise direction. Therefore, it is not more necessary to fix the heater with a great force, and deterioration of life of the heater due to generation of cracks in the terminals of the heater is prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19710587A JPS6442389A (en) | 1987-08-06 | 1987-08-06 | Pulling device for silicon single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19710587A JPS6442389A (en) | 1987-08-06 | 1987-08-06 | Pulling device for silicon single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6442389A true JPS6442389A (en) | 1989-02-14 |
Family
ID=16368812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19710587A Pending JPS6442389A (en) | 1987-08-06 | 1987-08-06 | Pulling device for silicon single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6442389A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0781874A3 (en) * | 1995-12-28 | 1998-03-04 | Shin-Etsu Handotai Company Limited | Apparatus for producing silicon single crystal |
-
1987
- 1987-08-06 JP JP19710587A patent/JPS6442389A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0781874A3 (en) * | 1995-12-28 | 1998-03-04 | Shin-Etsu Handotai Company Limited | Apparatus for producing silicon single crystal |
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