JPS6439728U - - Google Patents

Info

Publication number
JPS6439728U
JPS6439728U JP13534987U JP13534987U JPS6439728U JP S6439728 U JPS6439728 U JP S6439728U JP 13534987 U JP13534987 U JP 13534987U JP 13534987 U JP13534987 U JP 13534987U JP S6439728 U JPS6439728 U JP S6439728U
Authority
JP
Japan
Prior art keywords
tips
extends
tubes
water
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13534987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423551Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987135349U priority Critical patent/JPH0423551Y2/ja
Publication of JPS6439728U publication Critical patent/JPS6439728U/ja
Application granted granted Critical
Publication of JPH0423551Y2 publication Critical patent/JPH0423551Y2/ja
Expired legal-status Critical Current

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  • Massaging Devices (AREA)
JP1987135349U 1987-09-04 1987-09-04 Expired JPH0423551Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987135349U JPH0423551Y2 (fr) 1987-09-04 1987-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987135349U JPH0423551Y2 (fr) 1987-09-04 1987-09-04

Publications (2)

Publication Number Publication Date
JPS6439728U true JPS6439728U (fr) 1989-03-09
JPH0423551Y2 JPH0423551Y2 (fr) 1992-06-02

Family

ID=31394893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987135349U Expired JPH0423551Y2 (fr) 1987-09-04 1987-09-04

Country Status (1)

Country Link
JP (1) JPH0423551Y2 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578229U (ja) * 1992-03-30 1993-10-26 株式会社イナックス 浴 槽
US7364798B2 (en) 1999-12-10 2008-04-29 Tocalo Co., Ltd. Internal member for plasma-treating vessel and method of producing the same
US7494723B2 (en) 2005-07-29 2009-02-24 Tocalo Co., Ltd. Y2O3 spray-coated member and production method thereof
US7648782B2 (en) 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7767268B2 (en) 2005-09-08 2010-08-03 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US7850864B2 (en) 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method
US8877002B2 (en) 2002-11-28 2014-11-04 Tokyo Electron Limited Internal member of a plasma processing vessel

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180026U (fr) * 1984-10-30 1986-05-28
JPS624329U (fr) * 1985-06-25 1987-01-12

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526006A1 (fr) * 1982-04-30 1983-11-04 Comurhex Procede d'obtention de uo3 de grande surface specifique a partir de nitrate d'uranyle hydrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180026U (fr) * 1984-10-30 1986-05-28
JPS624329U (fr) * 1985-06-25 1987-01-12

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0578229U (ja) * 1992-03-30 1993-10-26 株式会社イナックス 浴 槽
US7364798B2 (en) 1999-12-10 2008-04-29 Tocalo Co., Ltd. Internal member for plasma-treating vessel and method of producing the same
US8877002B2 (en) 2002-11-28 2014-11-04 Tokyo Electron Limited Internal member of a plasma processing vessel
US7494723B2 (en) 2005-07-29 2009-02-24 Tocalo Co., Ltd. Y2O3 spray-coated member and production method thereof
US7767268B2 (en) 2005-09-08 2010-08-03 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US7648782B2 (en) 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7850864B2 (en) 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method

Also Published As

Publication number Publication date
JPH0423551Y2 (fr) 1992-06-02

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