JPS6439631U - - Google Patents
Info
- Publication number
- JPS6439631U JPS6439631U JP13368687U JP13368687U JPS6439631U JP S6439631 U JPS6439631 U JP S6439631U JP 13368687 U JP13368687 U JP 13368687U JP 13368687 U JP13368687 U JP 13368687U JP S6439631 U JPS6439631 U JP S6439631U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- drive mechanism
- vibrates
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13368687U JPS6439631U (zh) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13368687U JPS6439631U (zh) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439631U true JPS6439631U (zh) | 1989-03-09 |
Family
ID=31391779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13368687U Pending JPS6439631U (zh) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439631U (zh) |
-
1987
- 1987-08-31 JP JP13368687U patent/JPS6439631U/ja active Pending
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