JPS6439629U - - Google Patents
Info
- Publication number
- JPS6439629U JPS6439629U JP1987133301U JP13330187U JPS6439629U JP S6439629 U JPS6439629 U JP S6439629U JP 1987133301 U JP1987133301 U JP 1987133301U JP 13330187 U JP13330187 U JP 13330187U JP S6439629 U JPS6439629 U JP S6439629U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- semiconductor manufacturing
- furnace
- core tube
- temperature peak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133301U JPS6439629U (enExample) | 1987-09-02 | 1987-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987133301U JPS6439629U (enExample) | 1987-09-02 | 1987-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6439629U true JPS6439629U (enExample) | 1989-03-09 |
Family
ID=31391036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987133301U Pending JPS6439629U (enExample) | 1987-09-02 | 1987-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6439629U (enExample) |
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1987
- 1987-09-02 JP JP1987133301U patent/JPS6439629U/ja active Pending