JPS643951A - Ion implantation method and device - Google Patents
Ion implantation method and deviceInfo
- Publication number
- JPS643951A JPS643951A JP62157928A JP15792887A JPS643951A JP S643951 A JPS643951 A JP S643951A JP 62157928 A JP62157928 A JP 62157928A JP 15792887 A JP15792887 A JP 15792887A JP S643951 A JPS643951 A JP S643951A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- implanted
- charge
- relaxed
- fed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 150000002500 ions Chemical class 0.000 abstract 3
- 230000003472 neutralizing effect Effects 0.000 abstract 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62157928A JP2550077B2 (ja) | 1987-06-26 | 1987-06-26 | イオン注入方法及び装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62157928A JP2550077B2 (ja) | 1987-06-26 | 1987-06-26 | イオン注入方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS643951A true JPS643951A (en) | 1989-01-09 |
JP2550077B2 JP2550077B2 (ja) | 1996-10-30 |
Family
ID=15660534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62157928A Expired - Fee Related JP2550077B2 (ja) | 1987-06-26 | 1987-06-26 | イオン注入方法及び装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2550077B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0384842A (ja) * | 1989-08-28 | 1991-04-10 | Nissin Electric Co Ltd | イオン処理装置 |
JPH04337237A (ja) * | 1990-12-13 | 1992-11-25 | Applied Materials Inc | イオン注入における電荷のサンプリング |
JPH0574405A (ja) * | 1991-09-13 | 1993-03-26 | Nec Corp | イオン注入装置およびイオン注入方法 |
-
1987
- 1987-06-26 JP JP62157928A patent/JP2550077B2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0384842A (ja) * | 1989-08-28 | 1991-04-10 | Nissin Electric Co Ltd | イオン処理装置 |
JPH04337237A (ja) * | 1990-12-13 | 1992-11-25 | Applied Materials Inc | イオン注入における電荷のサンプリング |
JPH0574405A (ja) * | 1991-09-13 | 1993-03-26 | Nec Corp | イオン注入装置およびイオン注入方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2550077B2 (ja) | 1996-10-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |