JPS6439375A - Method for forming deposited film - Google Patents
Method for forming deposited filmInfo
- Publication number
- JPS6439375A JPS6439375A JP19272987A JP19272987A JPS6439375A JP S6439375 A JPS6439375 A JP S6439375A JP 19272987 A JP19272987 A JP 19272987A JP 19272987 A JP19272987 A JP 19272987A JP S6439375 A JPS6439375 A JP S6439375A
- Authority
- JP
- Japan
- Prior art keywords
- holding means
- deposition surface
- deposition
- deposited film
- columnar body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To uniformly form a deposited film on a deposition surface by flying deposited film forming particles to a columnar body from the lower part, and positioning the bottom of a holding means adjacent to the deposition surface of the columnar body above the deposition surface of the columnar body. CONSTITUTION:Grooves 2 are provided on the holding means 1 in parallel, and grooves 3 are formed on the back orthogonally to the groove 2. A cleaved strip-shaped semiconductor laser 4 having a prescribed width is inserted into the groove 2 with the surface to be coated with a film directed downward. The deposition surface of the semiconductor laser 4 is positioned below the bottom of the adjacent holding means 1, and the deposition surface is not shaded by the holding means 1. The holding means 1 is further set to the vapor deposition device by a jig 5, the area close to the jig 5 is heated to >=about 200 deg.C in the vacuum at about 10<-5>Torr to heat and vaporize the vapor deposition source 6, and deposition is carried out while controlling the film thickness by a shutter 8. By this method, a deposited film having uniform thickness and quality is formed on the deposition surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62192729A JPH0715146B2 (en) | 1987-08-03 | 1987-08-03 | Deposited film formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62192729A JPH0715146B2 (en) | 1987-08-03 | 1987-08-03 | Deposited film formation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6439375A true JPS6439375A (en) | 1989-02-09 |
JPH0715146B2 JPH0715146B2 (en) | 1995-02-22 |
Family
ID=16296094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62192729A Expired - Fee Related JPH0715146B2 (en) | 1987-08-03 | 1987-08-03 | Deposited film formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0715146B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60110464U (en) * | 1983-12-28 | 1985-07-26 | ホ−ヤ株式会社 | Board storage device |
-
1987
- 1987-08-03 JP JP62192729A patent/JPH0715146B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60110464U (en) * | 1983-12-28 | 1985-07-26 | ホ−ヤ株式会社 | Board storage device |
Also Published As
Publication number | Publication date |
---|---|
JPH0715146B2 (en) | 1995-02-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |