JPS6439375A - Method for forming deposited film - Google Patents

Method for forming deposited film

Info

Publication number
JPS6439375A
JPS6439375A JP19272987A JP19272987A JPS6439375A JP S6439375 A JPS6439375 A JP S6439375A JP 19272987 A JP19272987 A JP 19272987A JP 19272987 A JP19272987 A JP 19272987A JP S6439375 A JPS6439375 A JP S6439375A
Authority
JP
Japan
Prior art keywords
holding means
deposition surface
deposition
deposited film
columnar body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19272987A
Other languages
Japanese (ja)
Other versions
JPH0715146B2 (en
Inventor
Masahiro Okuda
Seiichi Miyazawa
Yasushi Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62192729A priority Critical patent/JPH0715146B2/en
Publication of JPS6439375A publication Critical patent/JPS6439375A/en
Publication of JPH0715146B2 publication Critical patent/JPH0715146B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To uniformly form a deposited film on a deposition surface by flying deposited film forming particles to a columnar body from the lower part, and positioning the bottom of a holding means adjacent to the deposition surface of the columnar body above the deposition surface of the columnar body. CONSTITUTION:Grooves 2 are provided on the holding means 1 in parallel, and grooves 3 are formed on the back orthogonally to the groove 2. A cleaved strip-shaped semiconductor laser 4 having a prescribed width is inserted into the groove 2 with the surface to be coated with a film directed downward. The deposition surface of the semiconductor laser 4 is positioned below the bottom of the adjacent holding means 1, and the deposition surface is not shaded by the holding means 1. The holding means 1 is further set to the vapor deposition device by a jig 5, the area close to the jig 5 is heated to >=about 200 deg.C in the vacuum at about 10<-5>Torr to heat and vaporize the vapor deposition source 6, and deposition is carried out while controlling the film thickness by a shutter 8. By this method, a deposited film having uniform thickness and quality is formed on the deposition surface.
JP62192729A 1987-08-03 1987-08-03 Deposited film formation method Expired - Fee Related JPH0715146B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62192729A JPH0715146B2 (en) 1987-08-03 1987-08-03 Deposited film formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192729A JPH0715146B2 (en) 1987-08-03 1987-08-03 Deposited film formation method

Publications (2)

Publication Number Publication Date
JPS6439375A true JPS6439375A (en) 1989-02-09
JPH0715146B2 JPH0715146B2 (en) 1995-02-22

Family

ID=16296094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192729A Expired - Fee Related JPH0715146B2 (en) 1987-08-03 1987-08-03 Deposited film formation method

Country Status (1)

Country Link
JP (1) JPH0715146B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110464U (en) * 1983-12-28 1985-07-26 ホ−ヤ株式会社 Board storage device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110464U (en) * 1983-12-28 1985-07-26 ホ−ヤ株式会社 Board storage device

Also Published As

Publication number Publication date
JPH0715146B2 (en) 1995-02-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees