JPS643847U - - Google Patents
Info
- Publication number
- JPS643847U JPS643847U JP1987094770U JP9477087U JPS643847U JP S643847 U JPS643847 U JP S643847U JP 1987094770 U JP1987094770 U JP 1987094770U JP 9477087 U JP9477087 U JP 9477087U JP S643847 U JPS643847 U JP S643847U
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet light
- photomask
- far ultraviolet
- thin film
- photomask substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 5
- 238000002834 transmittance Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987094770U JPS643847U (fi) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987094770U JPS643847U (fi) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS643847U true JPS643847U (fi) | 1989-01-11 |
Family
ID=31319339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987094770U Pending JPS643847U (fi) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS643847U (fi) |
-
1987
- 1987-06-19 JP JP1987094770U patent/JPS643847U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6354101U (fi) | ||
| JPS643847U (fi) | ||
| JPS6039047U (ja) | マスクブランク板 | |
| JPS59135468A (ja) | 露光用マスク | |
| JPH0324601U (fi) | ||
| JPH01108541U (fi) | ||
| JPS61137948U (fi) | ||
| JPS636456U (fi) | ||
| JPS62161250U (fi) | ||
| JPS63155139U (fi) | ||
| JPS58102233A (ja) | フオトマスク | |
| JPS6181657U (fi) | ||
| JPS60104840U (ja) | フオトマスク | |
| JPS62106237U (fi) | ||
| JPS61171071U (fi) | ||
| JPS6390281U (fi) | ||
| JPS6051544U (ja) | 写真及び紫外線焼付等における焼付機 | |
| ATE138209T1 (de) | Maskenfilm | |
| JPH01157346U (fi) | ||
| JPH0370308A (ja) | 弾性表面波デバイス用マスクパターン | |
| JPS5437579A (en) | Chrome plate | |
| JPH0164625U (fi) | ||
| JPH0162331U (fi) | ||
| JPS62168492U (fi) | ||
| JPH0431146U (fi) |