JPS6437838A - Chemical liquid coater - Google Patents
Chemical liquid coaterInfo
- Publication number
- JPS6437838A JPS6437838A JP19496387A JP19496387A JPS6437838A JP S6437838 A JPS6437838 A JP S6437838A JP 19496387 A JP19496387 A JP 19496387A JP 19496387 A JP19496387 A JP 19496387A JP S6437838 A JPS6437838 A JP S6437838A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- solvent
- resist
- dripping
- nose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19496387A JPS6437838A (en) | 1987-08-03 | 1987-08-03 | Chemical liquid coater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19496387A JPS6437838A (en) | 1987-08-03 | 1987-08-03 | Chemical liquid coater |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437838A true JPS6437838A (en) | 1989-02-08 |
Family
ID=16333243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19496387A Pending JPS6437838A (en) | 1987-08-03 | 1987-08-03 | Chemical liquid coater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437838A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5081067A (ja) * | 1973-11-16 | 1975-07-01 | ||
JPS5446164A (en) * | 1977-09-21 | 1979-04-11 | Meidensha Electric Mfg Co Ltd | Control device for conveyor machince |
JPS5946164A (ja) * | 1982-09-08 | 1984-03-15 | Oki Electric Ind Co Ltd | 有機高分子溶液の塗布装置 |
-
1987
- 1987-08-03 JP JP19496387A patent/JPS6437838A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5081067A (ja) * | 1973-11-16 | 1975-07-01 | ||
JPS5446164A (en) * | 1977-09-21 | 1979-04-11 | Meidensha Electric Mfg Co Ltd | Control device for conveyor machince |
JPS5946164A (ja) * | 1982-09-08 | 1984-03-15 | Oki Electric Ind Co Ltd | 有機高分子溶液の塗布装置 |
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