JPS6437838A - Chemical liquid coater - Google Patents

Chemical liquid coater

Info

Publication number
JPS6437838A
JPS6437838A JP19496387A JP19496387A JPS6437838A JP S6437838 A JPS6437838 A JP S6437838A JP 19496387 A JP19496387 A JP 19496387A JP 19496387 A JP19496387 A JP 19496387A JP S6437838 A JPS6437838 A JP S6437838A
Authority
JP
Japan
Prior art keywords
pipe
solvent
resist
dripping
nose
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19496387A
Other languages
English (en)
Inventor
Makoto Tominaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19496387A priority Critical patent/JPS6437838A/ja
Publication of JPS6437838A publication Critical patent/JPS6437838A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP19496387A 1987-08-03 1987-08-03 Chemical liquid coater Pending JPS6437838A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19496387A JPS6437838A (en) 1987-08-03 1987-08-03 Chemical liquid coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19496387A JPS6437838A (en) 1987-08-03 1987-08-03 Chemical liquid coater

Publications (1)

Publication Number Publication Date
JPS6437838A true JPS6437838A (en) 1989-02-08

Family

ID=16333243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19496387A Pending JPS6437838A (en) 1987-08-03 1987-08-03 Chemical liquid coater

Country Status (1)

Country Link
JP (1) JPS6437838A (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (ja) * 1973-11-16 1975-07-01
JPS5446164A (en) * 1977-09-21 1979-04-11 Meidensha Electric Mfg Co Ltd Control device for conveyor machince
JPS5946164A (ja) * 1982-09-08 1984-03-15 Oki Electric Ind Co Ltd 有機高分子溶液の塗布装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (ja) * 1973-11-16 1975-07-01
JPS5446164A (en) * 1977-09-21 1979-04-11 Meidensha Electric Mfg Co Ltd Control device for conveyor machince
JPS5946164A (ja) * 1982-09-08 1984-03-15 Oki Electric Ind Co Ltd 有機高分子溶液の塗布装置

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