JPS6437635U - - Google Patents
Info
- Publication number
- JPS6437635U JPS6437635U JP13154987U JP13154987U JPS6437635U JP S6437635 U JPS6437635 U JP S6437635U JP 13154987 U JP13154987 U JP 13154987U JP 13154987 U JP13154987 U JP 13154987U JP S6437635 U JPS6437635 U JP S6437635U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- air inlet
- pressure sensor
- inlet hole
- gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000945 filler Substances 0.000 claims 1
- 230000035699 permeability Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Description
第１図は本案の一実施例の半導体式圧力センサ
の縦断面図、第２図は拡大縦断面図である。
１……ゲージ、２……集積回路、３……ハウジ
ング、４……充填材、５……カバー、６……ゴム
弁、７……大気導入孔。
FIG. 1 is a longitudinal sectional view of a semiconductor pressure sensor according to an embodiment of the present invention, and FIG. 2 is an enlarged longitudinal sectional view. 1...Gauge, 2...Integrated circuit, 3...Housing, 4...Filling material, 5...Cover, 6...Rubber valve, 7...Atmospheric introduction hole.
Claims (1)
ージの微小電気信号を増幅する集積回路をハウジ
ングへ接着後、出力特性を調整し、充填材を注入
し、カバーで前記ハウジングを覆う構造の圧力セ
ンサにおいて、前記ハウジングに大気導入孔と大
気導入孔開口部へガス透過性を有するゴム弁を設
けたことを特徴とする半導体式圧力センサ。 A pressure sensor having a structure in which a gauge body that converts pressure into an electrical signal and an integrated circuit that amplifies minute electrical signals of the gauge are bonded to a housing, the output characteristics are adjusted, a filler is injected, and the housing is covered with a cover, A semiconductor pressure sensor characterized in that the housing is provided with an air inlet hole and a rubber valve having gas permeability to the opening of the air inlet hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13154987U JPS6437635U (en) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13154987U JPS6437635U (en) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437635U true JPS6437635U (en) | 1989-03-07 |
Family
ID=31387723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13154987U Pending JPS6437635U (en) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437635U (en) |
-
1987
- 1987-08-31 JP JP13154987U patent/JPS6437635U/ja active Pending
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