JPS6435776U - - Google Patents
Info
- Publication number
- JPS6435776U JPS6435776U JP12950087U JP12950087U JPS6435776U JP S6435776 U JPS6435776 U JP S6435776U JP 12950087 U JP12950087 U JP 12950087U JP 12950087 U JP12950087 U JP 12950087U JP S6435776 U JPS6435776 U JP S6435776U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- optical system
- transparent material
- exposed surface
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims 2
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12950087U JPS6435776U (en, 2012) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12950087U JPS6435776U (en, 2012) | 1987-08-27 | 1987-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435776U true JPS6435776U (en, 2012) | 1989-03-03 |
Family
ID=31383831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12950087U Pending JPS6435776U (en, 2012) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435776U (en, 2012) |
-
1987
- 1987-08-27 JP JP12950087U patent/JPS6435776U/ja active Pending
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