JPS6435776U - - Google Patents
Info
- Publication number
- JPS6435776U JPS6435776U JP12950087U JP12950087U JPS6435776U JP S6435776 U JPS6435776 U JP S6435776U JP 12950087 U JP12950087 U JP 12950087U JP 12950087 U JP12950087 U JP 12950087U JP S6435776 U JPS6435776 U JP S6435776U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- optical system
- transparent material
- exposed surface
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims 2
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
Description
第２図は従来のものの正面断面図、第１図は本
考案の実施例を示す正面断面図である。
１：光源、２：光学系、３：露光面、４：筐体
、６：隔壁。
FIG. 2 is a front sectional view of a conventional device, and FIG. 1 is a front sectional view showing an embodiment of the present invention. 1: light source, 2: optical system, 3: exposure surface, 4: housing, 6: partition wall.
Claims (1)
換し、透明体よりなる露光面に照明するようにし
た露光桟において、前記露光面と光学系の間に透
明体よりなる隔壁を介在させて露光面との間に小
体積の室を形成し、その室を略真空状態にしたこ
とを特徴とする露光桟。 In an exposure frame that converts emitted light from a light source into parallel light through an optical system and illuminates an exposure surface made of a transparent material, a partition made of a transparent material is interposed between the exposure surface and the optical system. An exposure crosspiece characterized in that a small-volume chamber is formed between the exposed surface and the exposed surface, and the chamber is kept in a substantially vacuum state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12950087U JPS6435776U (en) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12950087U JPS6435776U (en) | 1987-08-27 | 1987-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435776U true JPS6435776U (en) | 1989-03-03 |
Family
ID=31383831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12950087U Pending JPS6435776U (en) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435776U (en) |
-
1987
- 1987-08-27 JP JP12950087U patent/JPS6435776U/ja active Pending
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