JPS6433842A - Ion implanter - Google Patents
Ion implanterInfo
- Publication number
- JPS6433842A JPS6433842A JP62190649A JP19064987A JPS6433842A JP S6433842 A JPS6433842 A JP S6433842A JP 62190649 A JP62190649 A JP 62190649A JP 19064987 A JP19064987 A JP 19064987A JP S6433842 A JPS6433842 A JP S6433842A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- charge
- energy
- generation
- increase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 abstract 12
- 230000004907 flux Effects 0.000 abstract 3
- 230000001678 irradiating effect Effects 0.000 abstract 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To increase the generation of an ion species with a charge more than a double charge and improve the ion generation efficiency by irradiating the light with the energy more than the difference between the second ionization energy and the first ionization energy to the single-charge ion flux generated by an ion source. CONSTITUTION:The light with the energy more than the difference between the second ionization energy and the first ionization energy is irradiated to the single-charge ion M<+> flux generated by an ion source to increase the generation of an ion species with a charge more than a double charge M<++>. The light energy (nu) is radiated to the ion flux generated by the ion source and flying as M<+> to excite it into M<++>, an ion implanter can increase the generation factor of ions with a charge more than a double charge, the ion generation efficiency is improved, and the implanter is made small-sized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62190649A JPS6433842A (en) | 1987-07-29 | 1987-07-29 | Ion implanter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62190649A JPS6433842A (en) | 1987-07-29 | 1987-07-29 | Ion implanter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6433842A true JPS6433842A (en) | 1989-02-03 |
Family
ID=16261596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62190649A Pending JPS6433842A (en) | 1987-07-29 | 1987-07-29 | Ion implanter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6433842A (en) |
-
1987
- 1987-07-29 JP JP62190649A patent/JPS6433842A/en active Pending
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