JPS6433613U - - Google Patents

Info

Publication number
JPS6433613U
JPS6433613U JP12665587U JP12665587U JPS6433613U JP S6433613 U JPS6433613 U JP S6433613U JP 12665587 U JP12665587 U JP 12665587U JP 12665587 U JP12665587 U JP 12665587U JP S6433613 U JPS6433613 U JP S6433613U
Authority
JP
Japan
Prior art keywords
target
displacement meter
displacement
laser
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12665587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12665587U priority Critical patent/JPS6433613U/ja
Publication of JPS6433613U publication Critical patent/JPS6433613U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12665587U 1987-08-20 1987-08-20 Pending JPS6433613U (US20100170793A1-20100708-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12665587U JPS6433613U (US20100170793A1-20100708-C00006.png) 1987-08-20 1987-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12665587U JPS6433613U (US20100170793A1-20100708-C00006.png) 1987-08-20 1987-08-20

Publications (1)

Publication Number Publication Date
JPS6433613U true JPS6433613U (US20100170793A1-20100708-C00006.png) 1989-03-02

Family

ID=31378371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12665587U Pending JPS6433613U (US20100170793A1-20100708-C00006.png) 1987-08-20 1987-08-20

Country Status (1)

Country Link
JP (1) JPS6433613U (US20100170793A1-20100708-C00006.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100703A (ja) * 1981-12-11 1983-06-15 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置
JPS6147237A (ja) * 1984-08-10 1986-03-07 アメレース・コーポレーシヨン 精密光学パターンを連続的にエンボスする方法及び装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58100703A (ja) * 1981-12-11 1983-06-15 Yokogawa Hokushin Electric Corp 光学式スケ−ル読取装置
JPS6147237A (ja) * 1984-08-10 1986-03-07 アメレース・コーポレーシヨン 精密光学パターンを連続的にエンボスする方法及び装置

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