JPS64330U - - Google Patents
Info
- Publication number
- JPS64330U JPS64330U JP9346887U JP9346887U JPS64330U JP S64330 U JPS64330 U JP S64330U JP 9346887 U JP9346887 U JP 9346887U JP 9346887 U JP9346887 U JP 9346887U JP S64330 U JPS64330 U JP S64330U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- predetermined regions
- etching apparatus
- electrolytic etching
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000000866 electrolytic etching Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9346887U JPH0514509Y2 (https=) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9346887U JPH0514509Y2 (https=) | 1987-06-19 | 1987-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS64330U true JPS64330U (https=) | 1989-01-05 |
| JPH0514509Y2 JPH0514509Y2 (https=) | 1993-04-19 |
Family
ID=30956072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9346887U Expired - Lifetime JPH0514509Y2 (https=) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514509Y2 (https=) |
-
1987
- 1987-06-19 JP JP9346887U patent/JPH0514509Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514509Y2 (https=) | 1993-04-19 |