JPS6433021U - - Google Patents
Info
- Publication number
- JPS6433021U JPS6433021U JP12742287U JP12742287U JPS6433021U JP S6433021 U JPS6433021 U JP S6433021U JP 12742287 U JP12742287 U JP 12742287U JP 12742287 U JP12742287 U JP 12742287U JP S6433021 U JPS6433021 U JP S6433021U
- Authority
- JP
- Japan
- Prior art keywords
- stator
- rotor
- cylindrical
- rotation axis
- coil pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims 2
- 230000005674 electromagnetic induction Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12742287U JPS6433021U (cs) | 1987-08-24 | 1987-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12742287U JPS6433021U (cs) | 1987-08-24 | 1987-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433021U true JPS6433021U (cs) | 1989-03-01 |
Family
ID=31379844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12742287U Pending JPS6433021U (cs) | 1987-08-24 | 1987-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433021U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010169499A (ja) * | 2009-01-22 | 2010-08-05 | Aisan Ind Co Ltd | 位置センサ |
| JP2020060481A (ja) * | 2018-10-11 | 2020-04-16 | 東京エレクトロン株式会社 | 回転角度検出装置及び回転角度検出方法、並びにこれらを用いた基板処理装置及び基板処理方法 |
-
1987
- 1987-08-24 JP JP12742287U patent/JPS6433021U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010169499A (ja) * | 2009-01-22 | 2010-08-05 | Aisan Ind Co Ltd | 位置センサ |
| JP2020060481A (ja) * | 2018-10-11 | 2020-04-16 | 東京エレクトロン株式会社 | 回転角度検出装置及び回転角度検出方法、並びにこれらを用いた基板処理装置及び基板処理方法 |
| KR20200041263A (ko) * | 2018-10-11 | 2020-04-21 | 도쿄엘렉트론가부시키가이샤 | 회전 각도 검출 장치 및 회전 각도 검출 방법, 그리고 이들을 사용한 기판 처리 장치 및 기판 처리 방법 |
| US11422008B2 (en) | 2018-10-11 | 2022-08-23 | Tokyo Electron Limited | Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same |