JPS6432U - - Google Patents

Info

Publication number
JPS6432U
JPS6432U JP9417187U JP9417187U JPS6432U JP S6432 U JPS6432 U JP S6432U JP 9417187 U JP9417187 U JP 9417187U JP 9417187 U JP9417187 U JP 9417187U JP S6432 U JPS6432 U JP S6432U
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
pedestal
sensor according
intermediate ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9417187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9417187U priority Critical patent/JPS6432U/ja
Publication of JPS6432U publication Critical patent/JPS6432U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP9417187U 1987-06-19 1987-06-19 Pending JPS6432U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9417187U JPS6432U (fr) 1987-06-19 1987-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417187U JPS6432U (fr) 1987-06-19 1987-06-19

Publications (1)

Publication Number Publication Date
JPS6432U true JPS6432U (fr) 1989-01-05

Family

ID=30957373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9417187U Pending JPS6432U (fr) 1987-06-19 1987-06-19

Country Status (1)

Country Link
JP (1) JPS6432U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2022019167A1 (fr) * 2020-07-21 2022-01-27

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476278A (en) * 1977-11-11 1979-06-18 Motorola Inc Method of making capacitive pressure transducer by piling up uniform glass insulator rings
JPS5854676A (ja) * 1981-09-28 1983-03-31 Hitachi Ltd 半導体圧力変換器
JPS60227142A (ja) * 1984-04-24 1985-11-12 Tdk Corp 圧力センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476278A (en) * 1977-11-11 1979-06-18 Motorola Inc Method of making capacitive pressure transducer by piling up uniform glass insulator rings
JPS5854676A (ja) * 1981-09-28 1983-03-31 Hitachi Ltd 半導体圧力変換器
JPS60227142A (ja) * 1984-04-24 1985-11-12 Tdk Corp 圧力センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2022019167A1 (fr) * 2020-07-21 2022-01-27

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