JPS6432630A - Microwave plasma treater - Google Patents

Microwave plasma treater

Info

Publication number
JPS6432630A
JPS6432630A JP18755387A JP18755387A JPS6432630A JP S6432630 A JPS6432630 A JP S6432630A JP 18755387 A JP18755387 A JP 18755387A JP 18755387 A JP18755387 A JP 18755387A JP S6432630 A JPS6432630 A JP S6432630A
Authority
JP
Japan
Prior art keywords
microwaves
plasma
circularly polarized
polarized wave
discharge tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18755387A
Other languages
Japanese (ja)
Inventor
Takuya Fukuda
Yasuhiro Mochizuki
Tadashi Sonobe
Kazuo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Service Engineering Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Service Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Service Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Service Engineering Co Ltd
Priority to JP18755387A priority Critical patent/JPS6432630A/en
Publication of JPS6432630A publication Critical patent/JPS6432630A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To increase the speed of plasma treatment by using a linearly polarized wave-circularly polarized wave converter having high efficiency as one part of a microwave plasma treater. CONSTITUTION:Microwaves having 2.45GHz are oscillated from a magnetron 1, are converted into the microwaves of linearly polarized waves formed through a rectangular waveguide 3 having an inside diameter of 120X120mm or circularly polarized waves by approximately 100% by a linearly polarized wave- circularly polarized wave converter 5, and are propagated through a circular waveguide 6 and a microwave introducing window in the top section of a discharge tube 7 made of quartz and enter the discharge tube. Microwaves propagated through the discharge tube 7 to which a magnetic field is applied generate electron cyclotron resonance (ECR) by interaction with the magnetic field, and plasma is generated. There is only circularly polarized waves in the clockwise direction in microwaves propagated in an ECR section and plasma in a region having magnetic flux density higher than the conditions of ECR, thus increasing the density of plasma with the elevation of the circularly polarized wave density of microwaves introduced to the discharge tube 7.
JP18755387A 1987-07-29 1987-07-29 Microwave plasma treater Pending JPS6432630A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18755387A JPS6432630A (en) 1987-07-29 1987-07-29 Microwave plasma treater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18755387A JPS6432630A (en) 1987-07-29 1987-07-29 Microwave plasma treater

Publications (1)

Publication Number Publication Date
JPS6432630A true JPS6432630A (en) 1989-02-02

Family

ID=16208093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18755387A Pending JPS6432630A (en) 1987-07-29 1987-07-29 Microwave plasma treater

Country Status (1)

Country Link
JP (1) JPS6432630A (en)

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