JPS6431388U - - Google Patents
Info
- Publication number
- JPS6431388U JPS6431388U JP12173387U JP12173387U JPS6431388U JP S6431388 U JPS6431388 U JP S6431388U JP 12173387 U JP12173387 U JP 12173387U JP 12173387 U JP12173387 U JP 12173387U JP S6431388 U JPS6431388 U JP S6431388U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- header
- exchange medium
- heat exchange
- medium inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Details Of Heat-Exchange And Heat-Transfer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12173387U JPS6431388U (de) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12173387U JPS6431388U (de) | 1987-08-07 | 1987-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6431388U true JPS6431388U (de) | 1989-02-27 |
Family
ID=31369013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12173387U Pending JPS6431388U (de) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6431388U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928215U (ja) * | 1982-08-12 | 1984-02-22 | 株式会社東芝 | 操作盤 |
| JPS6133435U (ja) * | 1984-07-31 | 1986-02-28 | 日本電気株式会社 | 半導体製造装置 |
-
1987
- 1987-08-07 JP JP12173387U patent/JPS6431388U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928215U (ja) * | 1982-08-12 | 1984-02-22 | 株式会社東芝 | 操作盤 |
| JPS6133435U (ja) * | 1984-07-31 | 1986-02-28 | 日本電気株式会社 | 半導体製造装置 |