JPS6430840U - - Google Patents

Info

Publication number
JPS6430840U
JPS6430840U JP12615887U JP12615887U JPS6430840U JP S6430840 U JPS6430840 U JP S6430840U JP 12615887 U JP12615887 U JP 12615887U JP 12615887 U JP12615887 U JP 12615887U JP S6430840 U JPS6430840 U JP S6430840U
Authority
JP
Japan
Prior art keywords
wafer
wafer storage
side plates
grooves
locking part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12615887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12615887U priority Critical patent/JPS6430840U/ja
Publication of JPS6430840U publication Critical patent/JPS6430840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP12615887U 1987-08-18 1987-08-18 Pending JPS6430840U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12615887U JPS6430840U (enrdf_load_stackoverflow) 1987-08-18 1987-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12615887U JPS6430840U (enrdf_load_stackoverflow) 1987-08-18 1987-08-18

Publications (1)

Publication Number Publication Date
JPS6430840U true JPS6430840U (enrdf_load_stackoverflow) 1989-02-27

Family

ID=31377418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12615887U Pending JPS6430840U (enrdf_load_stackoverflow) 1987-08-18 1987-08-18

Country Status (1)

Country Link
JP (1) JPS6430840U (enrdf_load_stackoverflow)

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