JPS6430827U - - Google Patents

Info

Publication number

JPS6430827U

JPS6430827U JP12581787U JP12581787U JPS6430827U JP S6430827 U JPS6430827 U JP S6430827U JP 12581787 U JP12581787 U JP 12581787U JP 12581787 U JP12581787 U JP 12581787U JP S6430827 U JPS6430827 U JP S6430827U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

base

opposing surface

annealing

impurity ions

Prior art date

1987-08-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000137 annealing Methods 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 5
• 239000012535 impurity Substances 0.000 claims 2
• 150000002500 ions Chemical class 0.000 claims 2
• 150000001875 compounds Chemical class 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1