JPS6430827U - - Google Patents
Info
- Publication number
- JPS6430827U JPS6430827U JP12581787U JP12581787U JPS6430827U JP S6430827 U JPS6430827 U JP S6430827U JP 12581787 U JP12581787 U JP 12581787U JP 12581787 U JP12581787 U JP 12581787U JP S6430827 U JPS6430827 U JP S6430827U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- base
- opposing surface
- annealing
- impurity ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000137 annealing Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12581787U JPS6430827U (enExample) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12581787U JPS6430827U (enExample) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430827U true JPS6430827U (enExample) | 1989-02-27 |
Family
ID=31376757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12581787U Pending JPS6430827U (enExample) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430827U (enExample) |
-
1987
- 1987-08-19 JP JP12581787U patent/JPS6430827U/ja active Pending