JPS6430825U - - Google Patents
Info
- Publication number
- JPS6430825U JPS6430825U JP12585987U JP12585987U JPS6430825U JP S6430825 U JPS6430825 U JP S6430825U JP 12585987 U JP12585987 U JP 12585987U JP 12585987 U JP12585987 U JP 12585987U JP S6430825 U JPS6430825 U JP S6430825U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pair
- supports
- groove
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12585987U JPS6430825U (fr) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12585987U JPS6430825U (fr) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430825U true JPS6430825U (fr) | 1989-02-27 |
Family
ID=31376836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12585987U Pending JPS6430825U (fr) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430825U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141221A (ja) * | 2008-12-15 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 酸化膜付きシリコン基板の製造方法 |
-
1987
- 1987-08-19 JP JP12585987U patent/JPS6430825U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141221A (ja) * | 2008-12-15 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 酸化膜付きシリコン基板の製造方法 |