JPS6430423U - - Google Patents
Info
- Publication number
- JPS6430423U JPS6430423U JP12505487U JP12505487U JPS6430423U JP S6430423 U JPS6430423 U JP S6430423U JP 12505487 U JP12505487 U JP 12505487U JP 12505487 U JP12505487 U JP 12505487U JP S6430423 U JPS6430423 U JP S6430423U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial layer
- type
- substrate
- recess
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000004020 conductor Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125054U JPH064304Y2 (ja) | 1987-08-17 | 1987-08-17 | 静電容量形半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125054U JPH064304Y2 (ja) | 1987-08-17 | 1987-08-17 | 静電容量形半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430423U true JPS6430423U (nl) | 1989-02-23 |
| JPH064304Y2 JPH064304Y2 (ja) | 1994-02-02 |
Family
ID=31375319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987125054U Expired - Lifetime JPH064304Y2 (ja) | 1987-08-17 | 1987-08-17 | 静電容量形半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064304Y2 (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002243516A (ja) * | 2001-02-13 | 2002-08-28 | Denso Corp | 薄膜部を有するセンサの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5764978A (en) * | 1980-10-03 | 1982-04-20 | Ibm | Capacitive pressure transducer |
| JPS60138434A (ja) * | 1983-12-27 | 1985-07-23 | Fuji Electric Co Ltd | 半導体形静電容量式圧力センサの製造方法 |
-
1987
- 1987-08-17 JP JP1987125054U patent/JPH064304Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5764978A (en) * | 1980-10-03 | 1982-04-20 | Ibm | Capacitive pressure transducer |
| JPS60138434A (ja) * | 1983-12-27 | 1985-07-23 | Fuji Electric Co Ltd | 半導体形静電容量式圧力センサの製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002243516A (ja) * | 2001-02-13 | 2002-08-28 | Denso Corp | 薄膜部を有するセンサの製造方法 |
| JP4639487B2 (ja) * | 2001-02-13 | 2011-02-23 | 株式会社デンソー | 薄膜部を有するセンサの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH064304Y2 (ja) | 1994-02-02 |