JPS6430403U - - Google Patents

Info

Publication number
JPS6430403U
JPS6430403U JP9907388U JP9907388U JPS6430403U JP S6430403 U JPS6430403 U JP S6430403U JP 9907388 U JP9907388 U JP 9907388U JP 9907388 U JP9907388 U JP 9907388U JP S6430403 U JPS6430403 U JP S6430403U
Authority
JP
Japan
Prior art keywords
substrate
optical
optical path
condensing
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9907388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9907388U priority Critical patent/JPS6430403U/ja
Publication of JPS6430403U publication Critical patent/JPS6430403U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP9907388U 1988-07-28 1988-07-28 Pending JPS6430403U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9907388U JPS6430403U (enrdf_load_stackoverflow) 1988-07-28 1988-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9907388U JPS6430403U (enrdf_load_stackoverflow) 1988-07-28 1988-07-28

Publications (1)

Publication Number Publication Date
JPS6430403U true JPS6430403U (enrdf_load_stackoverflow) 1989-02-23

Family

ID=31325897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9907388U Pending JPS6430403U (enrdf_load_stackoverflow) 1988-07-28 1988-07-28

Country Status (1)

Country Link
JP (1) JPS6430403U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5489680A (en) * 1977-12-26 1979-07-16 Matsushita Electric Ind Co Ltd Optical measuring method and optical measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5489680A (en) * 1977-12-26 1979-07-16 Matsushita Electric Ind Co Ltd Optical measuring method and optical measuring apparatus

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