JPS6430355U - - Google Patents
Info
- Publication number
- JPS6430355U JPS6430355U JP12499387U JP12499387U JPS6430355U JP S6430355 U JPS6430355 U JP S6430355U JP 12499387 U JP12499387 U JP 12499387U JP 12499387 U JP12499387 U JP 12499387U JP S6430355 U JPS6430355 U JP S6430355U
- Authority
- JP
- Japan
- Prior art keywords
- heating source
- rotating
- holder
- horizontally
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12499387U JPS6430355U (un) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12499387U JPS6430355U (un) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430355U true JPS6430355U (un) | 1989-02-23 |
Family
ID=31375203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12499387U Pending JPS6430355U (un) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430355U (un) |
-
1987
- 1987-08-17 JP JP12499387U patent/JPS6430355U/ja active Pending