JPS6430157U - - Google Patents
Info
- Publication number
- JPS6430157U JPS6430157U JP1987123410U JP12341087U JPS6430157U JP S6430157 U JPS6430157 U JP S6430157U JP 1987123410 U JP1987123410 U JP 1987123410U JP 12341087 U JP12341087 U JP 12341087U JP S6430157 U JPS6430157 U JP S6430157U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- template
- polishing holder
- base
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000004744 fabric Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123410U JPS6430157U (enExample) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987123410U JPS6430157U (enExample) | 1987-08-11 | 1987-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430157U true JPS6430157U (enExample) | 1989-02-23 |
Family
ID=31372238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987123410U Pending JPS6430157U (enExample) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430157U (enExample) |
-
1987
- 1987-08-11 JP JP1987123410U patent/JPS6430157U/ja active Pending