JPS6429789A - Detecting device for existence of sample - Google Patents
Detecting device for existence of sampleInfo
- Publication number
- JPS6429789A JPS6429789A JP62185679A JP18567987A JPS6429789A JP S6429789 A JPS6429789 A JP S6429789A JP 62185679 A JP62185679 A JP 62185679A JP 18567987 A JP18567987 A JP 18567987A JP S6429789 A JPS6429789 A JP S6429789A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- electric impedance
- insulator
- variation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Geophysics And Detection Of Objects (AREA)
Abstract
PURPOSE:To obtain a detecting device which can be operated surely without causing a malfunction, by a simple constitution, by deciding whether a result of detection of an electric impedance between a sample and a sample holder is held within a prescribed range or not. CONSTITUTION:A sample holder 1 is constituted by burying one piece of electrode 3 into an insulator 2, and sticking a thin plate-like insulator 4 thereon. On the other hand, to the electrode 3, an AC power source 6, a DC power source 7 and a part of a load electric impedance variation detecting means 8 are connected. Also, a sample 9 and the holder 1 form a capacitor by placing the insulator 4 between them, therefore, when a misalignment or an omission of the sample occurs, a clearance or a facing area is varied, therefore, a capacitance is varied. When an AC voltage is applied between the sample 9 and the holder 1, the variation of the capacitance is detected as a variation of the electric impedance by the detecting means 8, and whether a holding state of the sample is abnormal or not can be detected indirectly. A result of detection by this detecting means 8 is compared with a set value by a deciding means 10, and whether the electric impedance is held within a prescribed range or not is decided.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185679A JPS6429789A (en) | 1987-07-25 | 1987-07-25 | Detecting device for existence of sample |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185679A JPS6429789A (en) | 1987-07-25 | 1987-07-25 | Detecting device for existence of sample |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6429789A true JPS6429789A (en) | 1989-01-31 |
Family
ID=16174971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62185679A Pending JPS6429789A (en) | 1987-07-25 | 1987-07-25 | Detecting device for existence of sample |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6429789A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017008374A (en) * | 2015-06-23 | 2017-01-12 | 株式会社アルバック | Measuring method of deviation amount |
-
1987
- 1987-07-25 JP JP62185679A patent/JPS6429789A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017008374A (en) * | 2015-06-23 | 2017-01-12 | 株式会社アルバック | Measuring method of deviation amount |
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