JPS6428980A - Discharge type excimer laser device - Google Patents

Discharge type excimer laser device

Info

Publication number
JPS6428980A
JPS6428980A JP62184940A JP18494087A JPS6428980A JP S6428980 A JPS6428980 A JP S6428980A JP 62184940 A JP62184940 A JP 62184940A JP 18494087 A JP18494087 A JP 18494087A JP S6428980 A JPS6428980 A JP S6428980A
Authority
JP
Japan
Prior art keywords
impedance matching
impedance
circuit
laser gas
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62184940A
Other languages
Japanese (ja)
Inventor
Shinichiro Kawamura
Hitoshi Takeuchi
Hiroyuki Kondo
Hideo Hara
Kensho Tokuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62184940A priority Critical patent/JPS6428980A/en
Publication of JPS6428980A publication Critical patent/JPS6428980A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To perform impedance matching, at all times to improve laser oscillation efficiency, by providing an impedance matching means in which impedance matching between a discharge starting circuit and a discharge sustaining circuit is performed in accordance with a change in an impedance of a laser gas. CONSTITUTION:First and second matching circuits 4, 5 are composed of impedance matching means. Impedances of a spiker circuit 2 and a sustainer circuit 3 are changed in accordance with a change in impedance of a laser gas by means of first and second impedance matching circuits 4, 5, so that impedance matching is performed to make laser oscillation efficiency improvable. when the impedance matching of the laser gas is performed, not only the laser gas can be prevented from being deteriorated, but also loads of switching elements S1, S2 can be reduced. Also a life of the device can be enlarged accordingly.
JP62184940A 1987-07-24 1987-07-24 Discharge type excimer laser device Pending JPS6428980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62184940A JPS6428980A (en) 1987-07-24 1987-07-24 Discharge type excimer laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62184940A JPS6428980A (en) 1987-07-24 1987-07-24 Discharge type excimer laser device

Publications (1)

Publication Number Publication Date
JPS6428980A true JPS6428980A (en) 1989-01-31

Family

ID=16162015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62184940A Pending JPS6428980A (en) 1987-07-24 1987-07-24 Discharge type excimer laser device

Country Status (1)

Country Link
JP (1) JPS6428980A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04177776A (en) * 1990-11-09 1992-06-24 Mitsubishi Electric Corp Multiple oscillatation excimer laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04177776A (en) * 1990-11-09 1992-06-24 Mitsubishi Electric Corp Multiple oscillatation excimer laser

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