JPS6427844U - - Google Patents

Info

Publication number
JPS6427844U
JPS6427844U JP8278087U JP8278087U JPS6427844U JP S6427844 U JPS6427844 U JP S6427844U JP 8278087 U JP8278087 U JP 8278087U JP 8278087 U JP8278087 U JP 8278087U JP S6427844 U JPS6427844 U JP S6427844U
Authority
JP
Japan
Prior art keywords
moving
sets
moving plate
mechanisms
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8278087U
Other languages
Japanese (ja)
Other versions
JPH0726730Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987082780U priority Critical patent/JPH0726730Y2/en
Publication of JPS6427844U publication Critical patent/JPS6427844U/ja
Application granted granted Critical
Publication of JPH0726730Y2 publication Critical patent/JPH0726730Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Mechanical Control Devices (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本実施例を示す断面図、第２図は本実
施例のピポツト支持部分を表わす斜視図、第３図
は本実施例の傾き調整方法を示す説明図、第４図
は従来の例を示す断面図である。 １…探針、２…試料、３…移動板、６…マイク
ロメータヘツド、７…軸Ａ、８…軸Ｂ。 Fig. 1 is a sectional view showing this embodiment, Fig. 2 is a perspective view showing the pivot support part of this embodiment, Fig. 3 is an explanatory diagram showing the tilt adjustment method of this embodiment, and Fig. 4 is a conventional method. It is a sectional view showing an example. DESCRIPTION OF SYMBOLS 1... Probe, 2... Sample, 3... Moving plate, 6... Micrometer head, 7... Axis A, 8... Axis B.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 探針と試料の位置合わせを一軸方向に行うため
の精密位置決め機構において、該機構が２組の移
動機構と試料が保持される移動板とから成り、該
移動板は前記２組の移動機構で支持され、粗送り
は前記２組の移動機構で前記移動板を平行移動さ
せて行い、微動送りは片側の移動機構で前記移動
板を傾ける移動量を縮小して行うことを特徴とす
る精密位置決め機構。 In a precision positioning mechanism for aligning a probe and a sample in a uniaxial direction, the mechanism is composed of two sets of moving mechanisms and a moving plate on which the sample is held, and the moving plate is connected to the two sets of moving mechanisms. Precise positioning characterized in that coarse feeding is performed by moving the moving plate in parallel using the two sets of moving mechanisms, and fine feeding is performed by reducing the amount of movement of tilting the moving plate using one moving mechanism. mechanism.
JP1987082780U 1987-05-29 1987-05-29 Precision positioning mechanism Expired - Lifetime JPH0726730Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987082780U JPH0726730Y2 (en) 1987-05-29 1987-05-29 Precision positioning mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987082780U JPH0726730Y2 (en) 1987-05-29 1987-05-29 Precision positioning mechanism

Publications (2)

Publication Number Publication Date
JPS6427844U true JPS6427844U (en) 1989-02-17
JPH0726730Y2 JPH0726730Y2 (en) 1995-06-14

Family

ID=31307521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987082780U Expired - Lifetime JPH0726730Y2 (en) 1987-05-29 1987-05-29 Precision positioning mechanism

Country Status (1)

Country Link
JP (1) JPH0726730Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257567U (en) * 1975-10-22 1977-04-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257567U (en) * 1975-10-22 1977-04-26

Also Published As

Publication number Publication date
JPH0726730Y2 (en) 1995-06-14

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