JPS6427181U

JPS6427181U -

Info

Publication number: JPS6427181U
Application number: JP12177987U
Authority: JP
Priority date: 1987-08-08
Filing date: 1987-08-08
Publication date: 1989-02-16

Description

[Brief explanation of the drawing]

第１図はこの考案の実施例の構成を示す側面図
、第２図はこの実施例における第１のマーカ及び
第２のマーカの画像を示す図、第３図は従来の技
術による位置決め装置の構成を示す側面図、第４
図ａは第３図に示す位置制御装置に用いられるマ
ーカの平面図、第４図ｂは第４図ａに示すマーカ
の側面図、第５図は第３図に示すマーカの電子ビ
ームの反射状況を示す側面図、第６図ａ及び第６
図ｂは従来の技術による電子ビーム制御装置の反
射電子センサーの出力を示す波形図である。１１……被加工物、１３……テーブル、１４…
…電子ビーム発生部、４５……位置調整部、５１
ａ……第１のマーカ、５１ｂ……第２のマーカ、
５２……マーカテーブル、５３……Ｘ線検出装置
、５５……結合部材、５６……Ｘ線。 FIG. 1 is a side view showing the configuration of an embodiment of this invention, FIG. 2 is a diagram showing images of a first marker and a second marker in this embodiment, and FIG. 3 is a diagram showing a positioning device according to the prior art. Side view showing the configuration, No. 4
Figure a is a plan view of the marker used in the position control device shown in Figure 3, Figure 4 b is a side view of the marker shown in Figure 4 a, and Figure 5 is the reflection of the electron beam of the marker shown in Figure 3. Side view showing the situation, Figures 6a and 6
FIG. b is a waveform diagram showing the output of a backscattered electron sensor of a conventional electron beam control device. 11... Workpiece, 13... Table, 14...
...Electron beam generation section, 45...Position adjustment section, 51
a...first marker, 51b...second marker,
52...Marker table, 53...X-ray detection device, 55...Connection member, 56...X-ray.

Claims

[Claims for Utility Model Registration] Beam generating means that generates both X-rays and electron beams, a table loaded with workpieces and moved according to a predetermined program, and a marker connected to the beam generating means via a connecting member. a table; a first marker provided at a part of the table that is irradiated with the X-rays and through which the X-rays can pass; and made of a material with a high X-ray absorption rate; a second marker provided at a location through which radiation can pass and made of a substance with high X-ray absorption; an X-ray detection device that detects the transmitted X-rays of the first marker and the second marker; an image processing unit that detects a positional deviation of the first marker with respect to the second marker based on the output of the detection device; and an image processing unit that moves the table based on the output of the image processing unit to change the position of the first marker to the position of the second marker. An electron beam control device equipped with a position adjustment unit that matches the position.