JPS6426841U - - Google Patents
Info
- Publication number
- JPS6426841U JPS6426841U JP12039187U JP12039187U JPS6426841U JP S6426841 U JPS6426841 U JP S6426841U JP 12039187 U JP12039187 U JP 12039187U JP 12039187 U JP12039187 U JP 12039187U JP S6426841 U JPS6426841 U JP S6426841U
- Authority
- JP
- Japan
- Prior art keywords
- suction stage
- grooves
- counterbore
- stage
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 238000001179 sorption measurement Methods 0.000 description 2
Landscapes
- Jigs For Machine Tools (AREA)
- Joints Allowing Movement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12039187U JPS6426841U (he) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12039187U JPS6426841U (he) | 1987-08-07 | 1987-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426841U true JPS6426841U (he) | 1989-02-15 |
Family
ID=31366456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12039187U Pending JPS6426841U (he) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426841U (he) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379754U (he) * | 1986-11-14 | 1988-05-26 | ||
| JP2017139465A (ja) * | 2016-02-03 | 2017-08-10 | ヘルムート・フィッシャー・ゲーエムベーハー・インスティテュート・フューア・エレクトロニク・ウント・メステクニク | 加工物を固定するための真空チャック、加工物、特にウエハを検査するための測定装置および方法 |
-
1987
- 1987-08-07 JP JP12039187U patent/JPS6426841U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379754U (he) * | 1986-11-14 | 1988-05-26 | ||
| JP2017139465A (ja) * | 2016-02-03 | 2017-08-10 | ヘルムート・フィッシャー・ゲーエムベーハー・インスティテュート・フューア・エレクトロニク・ウント・メステクニク | 加工物を固定するための真空チャック、加工物、特にウエハを検査するための測定装置および方法 |