JPS6426642A - Production of thin film - Google Patents

Production of thin film

Info

Publication number
JPS6426642A
JPS6426642A JP18312187A JP18312187A JPS6426642A JP S6426642 A JPS6426642 A JP S6426642A JP 18312187 A JP18312187 A JP 18312187A JP 18312187 A JP18312187 A JP 18312187A JP S6426642 A JPS6426642 A JP S6426642A
Authority
JP
Japan
Prior art keywords
thin film
production
tetrafluoroethane
blend
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18312187A
Other languages
Japanese (ja)
Other versions
JPH0781009B2 (en
Inventor
Kunihiro Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP18312187A priority Critical patent/JPH0781009B2/en
Publication of JPS6426642A publication Critical patent/JPS6426642A/en
Publication of JPH0781009B2 publication Critical patent/JPH0781009B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)

Abstract

PURPOSE:To obtain a thin film useful as an electrical material, separation membrane, etc., by subjecting a blend of a fluorine substitution product of benzene with tetrafluoroethane to plasma polymerization and forming the thin film on a molded body of a substrate. CONSTITUTION:A blend of (A) a fluorine substitution product (e.g. hexafluorobenzene) with (B) tetrafluoroethane is subjected to plasma polymerization to form a thin film on a molded body of a substrate (e.g. polyethylene). Furthermore, the blending ratio of the components (A) to (B) is preferably 20:1-1:3 (volume ratio) and the film thickness is preferably 0.01-10mum.
JP18312187A 1987-07-22 1987-07-22 Thin film manufacturing method Expired - Lifetime JPH0781009B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18312187A JPH0781009B2 (en) 1987-07-22 1987-07-22 Thin film manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18312187A JPH0781009B2 (en) 1987-07-22 1987-07-22 Thin film manufacturing method

Publications (2)

Publication Number Publication Date
JPS6426642A true JPS6426642A (en) 1989-01-27
JPH0781009B2 JPH0781009B2 (en) 1995-08-30

Family

ID=16130157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18312187A Expired - Lifetime JPH0781009B2 (en) 1987-07-22 1987-07-22 Thin film manufacturing method

Country Status (1)

Country Link
JP (1) JPH0781009B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100367235B1 (en) * 2000-07-14 2003-01-10 대한민국 Crosslinking method of high density polyethylene using the plasma reaction and heat storage material prepared using the same
WO2020045501A1 (en) * 2018-08-28 2020-03-05 ダイキン工業株式会社 Fluorinated aromatic polymer and method for producing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100367235B1 (en) * 2000-07-14 2003-01-10 대한민국 Crosslinking method of high density polyethylene using the plasma reaction and heat storage material prepared using the same
WO2020045501A1 (en) * 2018-08-28 2020-03-05 ダイキン工業株式会社 Fluorinated aromatic polymer and method for producing same
JPWO2020045501A1 (en) * 2018-08-28 2021-08-10 ダイキン工業株式会社 Fluorine-containing aromatic polymer and its manufacturing method

Also Published As

Publication number Publication date
JPH0781009B2 (en) 1995-08-30

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