JPS6426379U - - Google Patents

Info

Publication number
JPS6426379U
JPS6426379U JP12094687U JP12094687U JPS6426379U JP S6426379 U JPS6426379 U JP S6426379U JP 12094687 U JP12094687 U JP 12094687U JP 12094687 U JP12094687 U JP 12094687U JP S6426379 U JPS6426379 U JP S6426379U
Authority
JP
Japan
Prior art keywords
reaction vessel
head tank
communicates
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12094687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516224Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12094687U priority Critical patent/JPH0516224Y2/ja
Publication of JPS6426379U publication Critical patent/JPS6426379U/ja
Application granted granted Critical
Publication of JPH0516224Y2 publication Critical patent/JPH0516224Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP12094687U 1987-08-06 1987-08-06 Expired - Lifetime JPH0516224Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12094687U JPH0516224Y2 (enrdf_load_stackoverflow) 1987-08-06 1987-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12094687U JPH0516224Y2 (enrdf_load_stackoverflow) 1987-08-06 1987-08-06

Publications (2)

Publication Number Publication Date
JPS6426379U true JPS6426379U (enrdf_load_stackoverflow) 1989-02-14
JPH0516224Y2 JPH0516224Y2 (enrdf_load_stackoverflow) 1993-04-28

Family

ID=31367511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12094687U Expired - Lifetime JPH0516224Y2 (enrdf_load_stackoverflow) 1987-08-06 1987-08-06

Country Status (1)

Country Link
JP (1) JPH0516224Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0516224Y2 (enrdf_load_stackoverflow) 1993-04-28

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