JPS6426379U - - Google Patents
Info
- Publication number
- JPS6426379U JPS6426379U JP12094687U JP12094687U JPS6426379U JP S6426379 U JPS6426379 U JP S6426379U JP 12094687 U JP12094687 U JP 12094687U JP 12094687 U JP12094687 U JP 12094687U JP S6426379 U JPS6426379 U JP S6426379U
- Authority
- JP
- Japan
- Prior art keywords
- reaction vessel
- head tank
- communicates
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
図面は本考案にかかる気相成長用冷却装置の説
明図である。
１……反応容器、２……ヘツドタンク、３……
貯水槽、４……ポンプ、５……供給管、６，７…
…戻り管、８……高周波コイル、９……ガス配管
、１０……揚水管、１１……レベル計、１２……
ヒーター、１３……補給水配管、１４……ガス排
出配管、１５……最上部戻り管、１６……屋上貯
水槽、１７……レベル計。
The drawing is an explanatory diagram of a cooling device for vapor phase growth according to the present invention. 1...Reaction container, 2...Head tank, 3...
Water tank, 4...pump, 5...supply pipe, 6,7...
... Return pipe, 8 ... High frequency coil, 9 ... Gas piping, 10 ... Lifting pipe, 11 ... Level meter, 12 ...
Heater, 13...makeup water piping, 14...gas discharge piping, 15...top return pipe, 16...rooftop water tank, 17...level meter.
Claims (1)
容器を冷却水により冷却する気相成長用冷却装置
において、前記反応容器の上方に設置されたヘツ
ドタンクと、貯水槽と、該貯水槽から前記ヘツド
タンクへ冷却水を揚水する循環ポンプと、ヘツド
タンクから反応容器へ連通する供給管と、循環ポ
ンプからヘツドタンクへ連通する揚水管と、反応
容器およびヘツドタンクから貯水槽へ連通する戻
り管とより構成され、該ヘツドタンクよりの落水
により前記反応容器の冷却を行うことを特徴とす
る気相成長用冷却装置。 A cooling device for vapor phase growth that performs vapor phase growth in a glass reaction vessel and cools the reaction vessel with cooling water includes a head tank installed above the reaction vessel, a water storage tank, and a water storage tank that connects the It consists of a circulation pump that pumps cooling water to the head tank, a supply pipe that communicates from the head tank to the reaction vessel, a lift pipe that communicates from the circulation pump to the head tank, and a return pipe that communicates from the reaction vessel and the head tank to the water storage tank, A cooling device for vapor phase growth, characterized in that the reaction vessel is cooled by water falling from the head tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094687U JPH0516224Y2 (en) | 1987-08-06 | 1987-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094687U JPH0516224Y2 (en) | 1987-08-06 | 1987-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426379U true JPS6426379U (en) | 1989-02-14 |
| JPH0516224Y2 JPH0516224Y2 (en) | 1993-04-28 |
Family
ID=31367511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12094687U Expired - Lifetime JPH0516224Y2 (en) | 1987-08-06 | 1987-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516224Y2 (en) |
-
1987
- 1987-08-06 JP JP12094687U patent/JPH0516224Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0516224Y2 (en) | 1993-04-28 |