JPS6426373U - - Google Patents

Info

Publication number
JPS6426373U
JPS6426373U JP1987121334U JP12133487U JPS6426373U JP S6426373 U JPS6426373 U JP S6426373U JP 1987121334 U JP1987121334 U JP 1987121334U JP 12133487 U JP12133487 U JP 12133487U JP S6426373 U JPS6426373 U JP S6426373U
Authority
JP
Japan
Prior art keywords
gas
header pipe
mixing device
supply pipes
piping system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987121334U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545382Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987121334U priority Critical patent/JPH0545382Y2/ja
Publication of JPS6426373U publication Critical patent/JPS6426373U/ja
Application granted granted Critical
Publication of JPH0545382Y2 publication Critical patent/JPH0545382Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987121334U 1987-08-07 1987-08-07 Expired - Lifetime JPH0545382Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121334U JPH0545382Y2 (enrdf_load_stackoverflow) 1987-08-07 1987-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121334U JPH0545382Y2 (enrdf_load_stackoverflow) 1987-08-07 1987-08-07

Publications (2)

Publication Number Publication Date
JPS6426373U true JPS6426373U (enrdf_load_stackoverflow) 1989-02-14
JPH0545382Y2 JPH0545382Y2 (enrdf_load_stackoverflow) 1993-11-19

Family

ID=31368246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121334U Expired - Lifetime JPH0545382Y2 (enrdf_load_stackoverflow) 1987-08-07 1987-08-07

Country Status (1)

Country Link
JP (1) JPH0545382Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012076083A (ja) * 2012-01-26 2012-04-19 Miike Iron Works Co Ltd 微細化混合装置
JP2015143384A (ja) * 2013-12-27 2015-08-06 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラムおよび記録媒体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100974848B1 (ko) * 2001-12-03 2010-08-11 가부시키가이샤 알박 혼합기, 박막 제조 장치 및 박막 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012076083A (ja) * 2012-01-26 2012-04-19 Miike Iron Works Co Ltd 微細化混合装置
JP2015143384A (ja) * 2013-12-27 2015-08-06 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラムおよび記録媒体

Also Published As

Publication number Publication date
JPH0545382Y2 (enrdf_load_stackoverflow) 1993-11-19

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