JPS6426365U - - Google Patents
Info
- Publication number
- JPS6426365U JPS6426365U JP12156487U JP12156487U JPS6426365U JP S6426365 U JPS6426365 U JP S6426365U JP 12156487 U JP12156487 U JP 12156487U JP 12156487 U JP12156487 U JP 12156487U JP S6426365 U JPS6426365 U JP S6426365U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- rotary table
- ion beam
- rotational force
- idler pulley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001659 ion-beam spectroscopy Methods 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156487U JPS6426365U (enExample) | 1987-08-08 | 1987-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12156487U JPS6426365U (enExample) | 1987-08-08 | 1987-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426365U true JPS6426365U (enExample) | 1989-02-14 |
Family
ID=31368682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12156487U Pending JPS6426365U (enExample) | 1987-08-08 | 1987-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426365U (enExample) |
-
1987
- 1987-08-08 JP JP12156487U patent/JPS6426365U/ja active Pending
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