JPS6426363U - - Google Patents

Info

Publication number
JPS6426363U
JPS6426363U JP11971287U JP11971287U JPS6426363U JP S6426363 U JPS6426363 U JP S6426363U JP 11971287 U JP11971287 U JP 11971287U JP 11971287 U JP11971287 U JP 11971287U JP S6426363 U JPS6426363 U JP S6426363U
Authority
JP
Japan
Prior art keywords
flow rate
gas
reactive
gas flow
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11971287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11971287U priority Critical patent/JPS6426363U/ja
Publication of JPS6426363U publication Critical patent/JPS6426363U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11971287U 1987-08-04 1987-08-04 Pending JPS6426363U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11971287U JPS6426363U (enrdf_load_stackoverflow) 1987-08-04 1987-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11971287U JPS6426363U (enrdf_load_stackoverflow) 1987-08-04 1987-08-04

Publications (1)

Publication Number Publication Date
JPS6426363U true JPS6426363U (enrdf_load_stackoverflow) 1989-02-14

Family

ID=31365181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11971287U Pending JPS6426363U (enrdf_load_stackoverflow) 1987-08-04 1987-08-04

Country Status (1)

Country Link
JP (1) JPS6426363U (enrdf_load_stackoverflow)

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