JPS6426147U - - Google Patents
Info
- Publication number
- JPS6426147U JPS6426147U JP1987121970U JP12197087U JPS6426147U JP S6426147 U JPS6426147 U JP S6426147U JP 1987121970 U JP1987121970 U JP 1987121970U JP 12197087 U JP12197087 U JP 12197087U JP S6426147 U JPS6426147 U JP S6426147U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- retaining ring
- guide roller
- center
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121970U JPH0426204Y2 (es) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121970U JPH0426204Y2 (es) | 1987-08-07 | 1987-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426147U true JPS6426147U (es) | 1989-02-14 |
| JPH0426204Y2 JPH0426204Y2 (es) | 1992-06-24 |
Family
ID=31369467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121970U Expired JPH0426204Y2 (es) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426204Y2 (es) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067848U (ja) * | 1983-10-18 | 1985-05-14 | 不二越機械工業株式会社 | 研磨装置 |
| JPS6226131U (es) * | 1985-07-26 | 1987-02-17 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56120043A (en) * | 1980-02-27 | 1981-09-21 | Tokyo Shibaura Electric Co | Vacuum valve |
-
1987
- 1987-08-07 JP JP1987121970U patent/JPH0426204Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067848U (ja) * | 1983-10-18 | 1985-05-14 | 不二越機械工業株式会社 | 研磨装置 |
| JPS6226131U (es) * | 1985-07-26 | 1987-02-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0426204Y2 (es) | 1992-06-24 |