JPS6426146U - - Google Patents
Info
- Publication number
- JPS6426146U JPS6426146U JP1987121969U JP12196987U JPS6426146U JP S6426146 U JPS6426146 U JP S6426146U JP 1987121969 U JP1987121969 U JP 1987121969U JP 12196987 U JP12196987 U JP 12196987U JP S6426146 U JPS6426146 U JP S6426146U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- arm
- retaining ring
- guide roller
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121969U JPH0417321Y2 (de) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121969U JPH0417321Y2 (de) | 1987-08-07 | 1987-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426146U true JPS6426146U (de) | 1989-02-14 |
| JPH0417321Y2 JPH0417321Y2 (de) | 1992-04-17 |
Family
ID=31369465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121969U Expired JPH0417321Y2 (de) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417321Y2 (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4934094A (de) * | 1972-07-31 | 1974-03-29 | ||
| JPS6067848U (ja) * | 1983-10-18 | 1985-05-14 | 不二越機械工業株式会社 | 研磨装置 |
-
1987
- 1987-08-07 JP JP1987121969U patent/JPH0417321Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4934094A (de) * | 1972-07-31 | 1974-03-29 | ||
| JPS6067848U (ja) * | 1983-10-18 | 1985-05-14 | 不二越機械工業株式会社 | 研磨装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0417321Y2 (de) | 1992-04-17 |