JPS6426146U - - Google Patents

Info

Publication number
JPS6426146U
JPS6426146U JP1987121969U JP12196987U JPS6426146U JP S6426146 U JPS6426146 U JP S6426146U JP 1987121969 U JP1987121969 U JP 1987121969U JP 12196987 U JP12196987 U JP 12196987U JP S6426146 U JPS6426146 U JP S6426146U
Authority
JP
Japan
Prior art keywords
surface plate
arm
retaining ring
guide roller
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987121969U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987121969U priority Critical patent/JPH0417321Y2/ja
Publication of JPS6426146U publication Critical patent/JPS6426146U/ja
Application granted granted Critical
Publication of JPH0417321Y2 publication Critical patent/JPH0417321Y2/ja
Expired legal-status Critical Current

Links

JP1987121969U 1987-08-07 1987-08-07 Expired JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987121969U JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-07 1987-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987121969U JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-07 1987-08-07

Publications (2)

Publication Number Publication Date
JPS6426146U true JPS6426146U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-14
JPH0417321Y2 JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-17

Family

ID=31369465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987121969U Expired JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-07 1987-08-07

Country Status (1)

Country Link
JP (1) JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934094A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-07-31 1974-03-29
JPS6067848U (ja) * 1983-10-18 1985-05-14 不二越機械工業株式会社 研磨装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934094A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-07-31 1974-03-29
JPS6067848U (ja) * 1983-10-18 1985-05-14 不二越機械工業株式会社 研磨装置

Also Published As

Publication number Publication date
JPH0417321Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-17

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