JPS6425644U - - Google Patents

Info

Publication number
JPS6425644U
JPS6425644U JP1987120604U JP12060487U JPS6425644U JP S6425644 U JPS6425644 U JP S6425644U JP 1987120604 U JP1987120604 U JP 1987120604U JP 12060487 U JP12060487 U JP 12060487U JP S6425644 U JPS6425644 U JP S6425644U
Authority
JP
Japan
Prior art keywords
floor
clean room
ceiling
ceiling chamber
discharge port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987120604U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336839Y2 (US06623731-20030923-C00052.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987120604U priority Critical patent/JPH0336839Y2/ja
Publication of JPS6425644U publication Critical patent/JPS6425644U/ja
Application granted granted Critical
Publication of JPH0336839Y2 publication Critical patent/JPH0336839Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1987120604U 1987-08-06 1987-08-06 Expired JPH0336839Y2 (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987120604U JPH0336839Y2 (US06623731-20030923-C00052.png) 1987-08-06 1987-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987120604U JPH0336839Y2 (US06623731-20030923-C00052.png) 1987-08-06 1987-08-06

Publications (2)

Publication Number Publication Date
JPS6425644U true JPS6425644U (US06623731-20030923-C00052.png) 1989-02-13
JPH0336839Y2 JPH0336839Y2 (US06623731-20030923-C00052.png) 1991-08-05

Family

ID=31366863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987120604U Expired JPH0336839Y2 (US06623731-20030923-C00052.png) 1987-08-06 1987-08-06

Country Status (1)

Country Link
JP (1) JPH0336839Y2 (US06623731-20030923-C00052.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001486A1 (ja) * 2007-06-22 2008-12-31 Shinryo Corporation クリーンルームの空調方法及び空調装置
CN105546709A (zh) * 2016-02-04 2016-05-04 山东格瑞德集团有限公司 孔板送风布风系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107031A (ja) * 1984-10-30 1986-05-24 Taisei Corp クリ−ンル−ム装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107031A (ja) * 1984-10-30 1986-05-24 Taisei Corp クリ−ンル−ム装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001486A1 (ja) * 2007-06-22 2008-12-31 Shinryo Corporation クリーンルームの空調方法及び空調装置
TWI421457B (zh) * 2007-06-22 2014-01-01 新菱冷熱工業股份有限公司 潔淨室之空調方法及空調裝置
CN105546709A (zh) * 2016-02-04 2016-05-04 山东格瑞德集团有限公司 孔板送风布风系统

Also Published As

Publication number Publication date
JPH0336839Y2 (US06623731-20030923-C00052.png) 1991-08-05

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