JPS6424866U - - Google Patents
Info
- Publication number
- JPS6424866U JPS6424866U JP11952587U JP11952587U JPS6424866U JP S6424866 U JPS6424866 U JP S6424866U JP 11952587 U JP11952587 U JP 11952587U JP 11952587 U JP11952587 U JP 11952587U JP S6424866 U JPS6424866 U JP S6424866U
- Authority
- JP
- Japan
- Prior art keywords
- position detection
- detection element
- optical position
- film
- resistive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11952587U JPS6424866U (enExample) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11952587U JPS6424866U (enExample) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424866U true JPS6424866U (enExample) | 1989-02-10 |
Family
ID=31364831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11952587U Pending JPS6424866U (enExample) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424866U (enExample) |
-
1987
- 1987-08-04 JP JP11952587U patent/JPS6424866U/ja active Pending